Flexible micromachined transducer device and method for fabricating same
Techniques and structures for providing flexibility of a micromachined transducer array are provided. In an embodiment, a transducer array includes a plurality of transducer elements each comprising a piezoelectric element and one or more electrodes disposed in or on a support layer. The support lay...
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Format: | Patent |
Sprache: | chi ; eng |
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