Flexible micromachined transducer device and method for fabricating same

Techniques and structures for providing flexibility of a micromachined transducer array are provided. In an embodiment, a transducer array includes a plurality of transducer elements each comprising a piezoelectric element and one or more electrodes disposed in or on a support layer. The support layer is bonded to a flexible layer including a polymer material, wherein flexibility of the transducer array results in part from a total thickness of a flexible layer. In another embodiment, flexibility of the transducer array results in part from one or more flexural structures formed therein. 提供了微机械换能器阵列的柔性的技术和结构。在实施方式中，换能器阵列包括多个换能器元件，每个换能器元件包括压电元件和个或多个设置在支撑层中或支撑层上的电极。支撑层被结合至包括聚合物材料的柔性层，其中换能器阵列的柔性部分由柔性层的总厚度所产生。在另实施方式中，换能器阵列的柔性部分由在其中形成的个或多个折曲结构所产生。