Flip LED chip based on conductive DBR structure and manufacturing method thereof

The invention discloses a flip LED chip based on a conductive DBR structure and a manufacturing method thereof. A buffer layer, an N-GaN layer, an active layer and a P-GaN layer are sequentially grown on a substrate. The active layer and the P-GaN layer are etched to form a step and to expose part o...

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Bibliographische Detailangaben
Hauptverfasser: LYU QIMENG, WU QILONG, ZHANG YONG, ZHOU HONGYI, FANG TIANZU, LIU YINGCE, LI XIAOPING, CHEN KAIXUAN, WEI ZHENDONG, LI DUNXIAN, HUANG XINMAO, ZHUO XIANGJING, CHEN LIANG, CAI LIHE, JIANG WEI, LIN ZHIWEI
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention discloses a flip LED chip based on a conductive DBR structure and a manufacturing method thereof. A buffer layer, an N-GaN layer, an active layer and a P-GaN layer are sequentially grown on a substrate. The active layer and the P-GaN layer are etched to form a step and to expose part of the N-GaN layer. A DBR conductive reflection layer and a metal reflection layer are sequentially formed on the step of the P-GaN layer. An N metal conductive layer and a current expansion bar are arranged in the exposed portion of the N-GaN layer. An insulating layer is formed on the metal reflective layer and on the exposed portions of the N metal conductive layer and the N-GaN layer. Multiple through holes are formed on the insulating layer. A P eutectic layer and an N eutectic layer are formed on the insulating layer. The P eutectic layer is connected with the metal conductive layer via the through holes, and the N eutectic layer is connected with the N metal conductive layer via the through holes. The insulat