Thin film transistor fabrication method and array substrate fabrication method

The embodiment of the invention relates to a thin film transistor fabrication method and an array substrate fabrication method. The thin film transistor fabrication method comprises the process of forming a grid pattern, an active layer pattern and a pattern of a source and a drain on a substrate, a...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	JIN ZAIGUANG, WANG XIAOLIN, JIN XIZHE, CUI RONGGE, ZHENG ZAIWEN, MEI WENLIN, XU ZHUO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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