Method For Manufacturing Semiconductor Device

Provided is a method of manufacturing a semiconductor device with improved manufacturing efficiency for the semiconductor device. The method of manufacturing a semiconductor device includes the steps of: (a) forming a circuit at a front surface side of a wafer (semiconductor wafer) having the front...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: TAKAMITSU YOSHIHARA, TAKAHIRO KAINUMA, HIROI OKA
Format: Patent
Sprache:chi ; eng
Schlagworte:
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