Substrate transporting stage, scribing apparatus and method for transporting substrate

The invention relates to a substrate transporting stage, a scribing apparatus including the same and a method for transporting a substrate preventing substrate damage on the state. The substrate transporting stage includes a state onto which the substrate is disposed and which rotates to transport t...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KIM, JIN RAK, HA, WAN YONG, CHOI, HAN HYOUN
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention relates to a substrate transporting stage, a scribing apparatus including the same and a method for transporting a substrate preventing substrate damage on the state. The substrate transporting stage includes a state onto which the substrate is disposed and which rotates to transport the substrate along a direction, and an antistatic belt disposed to surround the table and preventing accumulation of static charges between the substrate and the stage, wherein the stage comprises first and second stages spaced at a preset distance along the transporting direction of the substrate, and controls rotation of the first stage and rotation of the second stage in an asynchronous manner. 本发明涉及种基板输送托台,包括所述基板输送托台的划线装置以及为了防止在托台上输送的基板损坏的输送基板的方法。基板输送托台包括:托台,基板置于所述托台上,并且所述托台旋转,以沿个方向输送置于其上的基板;以及抗静电带,所述抗静电带设置为围绕所述托台,并防止在所述基板与所述托台之间积聚静电荷,其中,所述托台包括设置为沿所述基板的输送方向以预定间距彼此间隔开的第托台和第二托台,并且以异步的方式控制所述第托台的旋转和所述第二托台的旋转。