An apparatus for growing a single crystal
According to an embodiment, an apparatus for growing a single crystal comprises: a chamber; a crucible formed inside the chamber and accommodating a melting liquid which is a raw material for growing the single crystal; a crucible screen arranged on an upper end of the crucible; and a transportation...
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Zusammenfassung: | According to an embodiment, an apparatus for growing a single crystal comprises: a chamber; a crucible formed inside the chamber and accommodating a melting liquid which is a raw material for growing the single crystal; a crucible screen arranged on an upper end of the crucible; and a transportation means elevating or dropping the crucible screen. Accordingly, the stroke can be adjusted by increasing the crucible screen and a first upper insulation unit. Also, impossibility of a lift off process caused by shortage of the stroke, and generation of cracks of the single crystal can be prevented.
实施例包括:腔室;坩埚,设置在该腔室中并且容纳熔融液体,该熔融液体是用于单晶生长的原料;坩锅屏,布置在该坩埚的上端;以及用于提高或降低该坩埚屏的移动单元,其中该坩埚屏和第上部绝热单元被升高以控制行程距离,从而防止由行程距离的缩短引起的提离过程的不可能性以及在单晶中产生裂纹。 |
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