Embedded piezoresistive micro stress sensor

The invention provides an embedded piezoresistive micro stress sensor which is composed of a shell, chip resistors, sensitive elements, printed electrodes and a baseplate. The shell is composed of an annular structural component of which the thickness is 1.8mm and the diameter is 7.8mm and a stainless steel circular film which is fixedly installed at one end of the annular structural component in an embedded way. Diffusion silicon piezoresistive sensitive elements are adopted to act as the sensitive elements. Two sensitive elements are arranged at the central position of the circular film. The other two sensitive elements are arranged at the edge position of the film. According to the designed piezoresistive micro stress sensor, a microelectronic micromechanical technology is adopted so that the flat micro contour of the stress sensor can be realized, and the stress sensor can be conveniently installed in a solid engine to perform interface stress measurement. Besides, the stress sensor has a tension and comp