Method of making reinforced metal hole

The invention provides a method of making a reinforced metal hole. The method comprises the following steps: (101) a through hole is processed in a substrate; (102) seed layers are sputtered on the front side and the back side of the substrate; (103) a photoresist is applied from the front side of t...

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Bibliographische Detailangaben
Hauptverfasser: Cao Qiantao, Song Zhenguo, Lu Bo, Hu Yinglu, Sang Jinzheng, Zhao Hailun, Fu Yanxin, Wang Bin
Format: Patent
Sprache:chi ; eng
Schlagworte:
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Beschreibung
Zusammenfassung:The invention provides a method of making a reinforced metal hole. The method comprises the following steps: (101) a through hole is processed in a substrate; (102) seed layers are sputtered on the front side and the back side of the substrate; (103) a photoresist is applied from the front side of the substrate; (104) the side, with the photoresist, of the substrate faces downwardly and obliquely and is rotated along a rotation shaft vertical with the oblique side under vertical irradiation of ultraviolet light and exposed; (105) one side, with the photoresist, of the substrate faces downwardly and is placed horizontally, and the side is tightly contacted with a reflector panel and is then exposed under vertical irradiation of ultraviolet light; (106) development is carried out; (107) electroplating is carried out; and (108) the photoresist is removed. According to the method of making the reinforced metal hole, no extra mask needs to be made, no photoetching machine is needed, and the method has the advantag