Miniature Fourier infrared spectrograph adopting MEMS translational micro-mirror and MEMS torsional micro-mirror

The invention relates to a Fourier infrared spectrograph system integrating an MEMS translational micro-mirror and an MEMS torsional micro-mirror. The system includes two subsystems, namely, a main interferometer system and an auxiliary interferometer system; the main interferometer system and the auxiliary interferometer system share one translational micro-mirror; the torsional micro-mirror is of a torsion beam structure, is driven through an electrostatic or magnetic induction mode, and can achieve high-speed rotary swing with a frequency reaching tens of Hertz to several thousands of hertz, and a rotation angle reaching fifty degrees maximally; and the translational micro-mirror is of a spring vibration structure, can achieve translational movement with a translational movement frequency reaching more than 100 MHz and a translational movement range reaching more than 100 microns. These micro-mirrors have the characteristics such as being free of friction, high repetition, high stability and the like. Sinc