Pre-cleaning method for using VGF (vertical gradient freeze) method to grow germanium monocrystals
The invention belongs to the technical field of germanium monocrystal growing, and particularly relates to a pre-cleaning method for using VGF (vertical gradient freeze) method to grow germanium monocrystals. The pre-cleaning method is characterized by including: performing corrosion cleaning on a g...
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Sprache: | chi ; eng |
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Zusammenfassung: | The invention belongs to the technical field of germanium monocrystal growing, and particularly relates to a pre-cleaning method for using VGF (vertical gradient freeze) method to grow germanium monocrystals. The pre-cleaning method is characterized by including: performing corrosion cleaning on a germanium ingot, a quartz tube, a PBN crucible and a seed crystal, particularly including: using first, second, third, fourth and fifth solutions to corrode the germanium ingot, the quartz tube, the PBN crucible and the seed crystal respectively; using deionized water for cleaning; using anhydrous alcohol for dewatering. Through the above steps, influence of impurities on the germanium monocrystals grown by using the VGF method subsequently can be avoided, and quality of the germanium monocrystals is guaranteed.
本发明属于锗单晶体生长技术领域,特别涉及用VGF法生长锗单晶体的预清洗方法。本发明公开了用VGF法生长锗单晶体的预清洗方法,其特征在于对锗锭、石英管、PBN坩埚及籽晶腐蚀清洗,具体包括用第、二、三、四、五溶液分别对锗锭、石英管、PBN坩埚及籽晶腐蚀,然后用去离子水清洗,用无水乙醇脱水,通过上述步骤,可实现后续使用VGF法生长出的锗单晶体不受杂质影响,保证了锗单晶片的质量。 |
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