Method for preparing silicon-nitride ceramic substrate through silicon-powder tape casting

The invention discloses a method for preparing a silicon-nitride ceramic substrate through silicon-powder tape casting, and belongs to the technical field of insulation substrates. The method includes the steps that silicon powder and an inorganic burning-assisting additive serve as raw materials, c...

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Bibliographische Detailangaben
Hauptverfasser: Lin Huatai, Ye Shunda, Huang Rongxia, Wu Youliang
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a method for preparing a silicon-nitride ceramic substrate through silicon-powder tape casting, and belongs to the technical field of insulation substrates. The method includes the steps that silicon powder and an inorganic burning-assisting additive serve as raw materials, castor oil serves as a dispersing agent, and polyvinyl butyral serves as a binding agent; according to the chemical state and the particle size of the surface of the silicon powder, a plasticizer capable of allowing the silicon powder to be subjected to tape casting is added, and a large-area green blank which is adjustable in thickness, smooth in surface and free of crack and pore is prepared; the green blank is subjected to rubber discharging to be sintered at the high temperature, and the silicon-nitride ceramic substrate with the heat conductivity larger than 50 W.m.K, the bending strength larger than 600 MPa and the fracture toughness larger than 8 MPa.mis prepared. 本发明公开了种硅粉流延制备氮化硅陶瓷基板的方法,属于绝缘基板技术