Method for manufacturing touch control display substrate and array substrate of touch display device
The invention discloses a method for manufacturing a touch control display substrate and an array substrate of a touch display device. A halftone mask plate is utilized to be matched with a thin film process, so that while a certain insulating layer thickness is guaranteed on a touch signal metal le...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention discloses a method for manufacturing a touch control display substrate and an array substrate of a touch display device. A halftone mask plate is utilized to be matched with a thin film process, so that while a certain insulating layer thickness is guaranteed on a touch signal metal lead, an insulating layer at other positions is subjected to thinning processing. On one hand, the conditions of via hole etching are balanced, and the over etching risk is reduced, so that the damage to the touch signal metal lead is avoided; on the other hand, storage capacitance is enlarged, and a good display effect is guaranteed.
本发明公开了种触控显示基板的制作方法及触控显示装置的阵列基板,利用半色调掩膜板配合薄膜工艺,使得触摸信号金属引线上保证定绝缘层厚度同时,其余位置绝缘层薄化处理,方面平衡了过孔刻蚀的情况,减少了过刻风险,从而避免触摸信号金属引线的损伤,另方面增大了存储电容,保证了良好的显示效果。 |
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