Inspection apparatus for transparent plate and cleaning and inspection system

The invention provides an inspection apparatus for a transparent plate and a cleaning and inspection system for the transparent plate, which can correctly inspect the transparent plate in the condition that foreign matters are difficult to attach to the transparent plate. The inspection apparatus fo...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Kenzou KOJO, Reo IMAFUKU, Hiroshi SADA, Shingo SASAKURA, Hiroshi AOYAMA, Katsuya EBISU, Toru HAYASHIDA
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CLEANING CLEANING IN GENERAL INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PERFORMING OPERATIONS PHYSICS PREVENTION OF FOULING IN GENERAL TESTING TRANSPORTING
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