Inspection apparatus for transparent plate and cleaning and inspection system

The invention provides an inspection apparatus for a transparent plate and a cleaning and inspection system for the transparent plate, which can correctly inspect the transparent plate in the condition that foreign matters are difficult to attach to the transparent plate. The inspection apparatus for the transparent plate is used for inspecting the transparent plate and includes: a housing having an input opening and an output opening for the transparent plate; a conveying mechanism for conveying the transparent plate from the input opening to the output opening; a inspection portion for inspecting the transparent plate conveyed by the conveying mechanism; and a foreign matter attachment stopping mechanism for stopping the foreign matters attaching to the transparent plate in the housing. The foreign matter attachment stopping mechanism has a pressure boosting mechanism for allowing the internal pressure to be higher than the external air pressure. The pressure boosting mechanism includes a feeding mechanism