Process gas supplier

The invention relates to a process gas supplier. The process gas supplier includes an outer tube providing a passage for a first process gas to flow, a first inner tube locating in the outer tube and providing a passage for a second process gas to flow, a gas reactor locating at an upper part of the...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	YEON,Se Hun, LEE,Yoo Jin, LEE,Jae Hak
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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