Process gas supplier

The invention relates to a process gas supplier. The process gas supplier includes an outer tube providing a passage for a first process gas to flow, a first inner tube locating in the outer tube and providing a passage for a second process gas to flow, a gas reactor locating at an upper part of the outer tube, accommodating a metal source and generating a third process gas by a reaction between the second process gas and the metal source, a second inner tube locating in the outer tube and providing a passage for the third process gas to flow, a third inner tube locating in the outer tube and providing a passage for a fourth process gas to flow, at least a first gas injector supplying the first process gas flowing in the outer tube to a processing space outside the outer tube, at least a second gas injector supplying the third process gas flowing in the second inner tube to the processing space outside the outer tube, and at least a third gas injector supplying the fourth process gas flowing in the third inne