VIBRATION ELEMENT, VIBRATION ELEMENT MANUFACTURING METHOD, ELECTRONIC DEVICE, ELECTRONIC APPARATUS, AND MOVING OBJECT

The present invention relates to a vibration element manufacturing method, a vibration element, an electronic device, an electronic apparatus, and a moving object. The invention provides a manufacturing method which can improve the yield and productivity of vibration elements and reduce manufacturing cost. The method of manufacturing a gyro element (100) as a vibration element is a manufacturing method of processing a quartz crystal substrate (10) to form an outward shape of a gyro element (100) including a vibrating arm and form recessed portions (58a, 58b) in a vibrating arm. The method includes forming the outward shape of a gyro element (100) from one surface of the quartz crystal substrate (10) using dry etching and forming the recessed portions (58a, 58b) using wet etching. 本发明提供种振动元件的制造方法、振动元件、电子装置、电子设备及移动体。并提供种提高振动元件的成品率和生产率而使制造成本下降的制造方法。作为振动元件的陀螺仪元件(100)的制造方法为，对水晶基板(10)进行加工而形成具有振动臂的陀螺仪元件(100)的外形以及在振动臂上形成凹部(58a、58b)的方法，且包括：外形形成工序，通过干蚀刻而从水晶基板(10)的个面形成陀螺仪元件(100)的外形；凹部形成工序，通过湿蚀刻而形成凹部(58a、58b)。