Flexible pressure sensor and preparation method thereof

The invention relates to a flexible pressure sensor and a preparation method thereof and belongs to the field of sensors. The flexible pressure sensor successively comprises, from top to bottom, a first micro nano structure PDMS film, a first CNT film, a millimeter structure PDMS layer, a second CNT film, and a second micro nano structure PDMS film. The millimeter structure PDMS layer comprises two strip-shaped PDMS films on both ends of the first CNT film and with thicknesses from 1 to 2mm. The surfaces of the first micro nano structure PDMS film and the second micro nano structure PDMS film are conical structures. The micro nano structure PDMS films prepared by using black silicon as a template is used as the electrode substrate of the pressure sensor, the CNT films are used as the electrodes of the pressure sensor, and the millimeter structure PDMS layer is introduced between the upper electrode and the lower electrode. Thus, the pressure sensor is greatly increased in sensitivity and good in stability. 种柔