MEMS (micro-electromechanical systems) atom air chamber applicable to orthogonal optical pumping and detection and preparing method of MEMS (micro-electromechanical systems) atom air chamber

The invention discloses an MEMS (micro-electromechanical systems) atom air chamber applicable to orthogonal optical pumping and detection and a preparing method of the MEMS (micro-electromechanical systems) atom air chamber. According to the air chamber and the method, the problems of high technolog...

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Bibliographische Detailangaben

Hauptverfasser:	WANG SHOUYUN, DU RUNCHANG, YANG LIN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	HOROLOGY MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PHYSICS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS TIME-INTERVAL MEASURING TRANSPORTING
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