MEMS (micro-electromechanical systems) atom air chamber applicable to orthogonal optical pumping and detection and preparing method of MEMS (micro-electromechanical systems) atom air chamber

The invention discloses an MEMS (micro-electromechanical systems) atom air chamber applicable to orthogonal optical pumping and detection and a preparing method of the MEMS (micro-electromechanical systems) atom air chamber. According to the air chamber and the method, the problems of high technology difficulty, pumping/detection light beams of the physical system of a nuclear magnetic resonance atom gyroscope and atoms interactive alkali metal air chamber, and temperature control of the air chamber in the prior art are solved. The MEMS (micro-electromechanical systems) atom air chamber applicable to orthogonal optical pumping and detection is characterized in that the air chamber comprises three layers of structures; wherein a middle layer is a glass substrate of which middle part is equipped with through holes; a top layer and a bottom layer are silicon wafers; the silicon wafers and the glass substrate are bonded to form the sealed alkali metal air chamber; and alkali metal atoms and inert gases are import