Metallization having high power compatibility and high electrical conductivity

A metallization, for carrying current in an electrical component, includes a bottom layer overlying a substrate surface and includes titanium (Ti) or a titanium compound as main constituent. An upper layer overlies the bottom layer and includes copper (Cu) as main constituent. The bottom layer and t...

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Bibliographische Detailangaben
Hauptverfasser: KNAUER ULRICH, JEWULA TOMASZ, NUESSL RUDOLF, ZOTTL HELMUT, RUILE WERNER, BINNINGER CHARLES
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:A metallization, for carrying current in an electrical component, includes a bottom layer overlying a substrate surface and includes titanium (Ti) or a titanium compound as main constituent. An upper layer overlies the bottom layer and includes copper (Cu) as main constituent. The bottom layer and the upper layer form a base layer. A top layer is in direct contact with the upper layer and includes aluminum (Al) as main constituent. The base layer further includes a middle layer, consisting of silver,that is arranged between the bottom layer and the upper layer. 本发明涉及用于电器件中的载流结构的金属化部及其制造方法,该金属化部布置在衬底(S)上,且具有基座、布置在该基座上的上覆层(TL)以及该基座中的布置在下层(BL)与上层(UL)之间的中间层(ML),其中基座包括下层(BL),该下层布置在衬底表面上方或者布置在衬底表面上并且包括Ti或者钛化合物作为主要成分,基座包括上层(UL),该上层布置在下层(BL)上方或者直接布置在下层(BL)上并且包括Cu作为主要成分,上覆层(TL)直接布置在上层上并且包括Al作为主要成分,以及中间层(ML)包括Ag。