Metal insulator metal capacitor and manufacturing method thereof

The invention discloses a metal insulator metal capacitor and a manufacturing method thereof. The method for manufacturing the metal insulator metal capacitor includes the steps of: providing a five-layer double-dielectric structure on a substrate. The five-layer double-dielectric structure includes a bottom metal layer, a first dielectric layer, an intermediate metal layer, a second dielectric layer and a top metal layer which are stacked in sequence. The first dielectric layer and the second dielectric layer have different thickness.