ON-OFF MICROVALVE WITH IMPROVED SEALING MECHANISM
The inventino provides an on-off microvalve with an improved sealing mechanism. A microvalve includes a first plate having a surface, a recessed region provided within the surface, a fluid port provided within the recessed region, and a sealing structure extending about the fluid port. A second plat...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The inventino provides an on-off microvalve with an improved sealing mechanism. A microvalve includes a first plate having a surface, a recessed region provided within the surface, a fluid port provided within the recessed region, and a sealing structure extending about the fluid port. A second plate defines a non-movable portion and a movable portion formed within the first opening and having an axis. A surface of the non-movable portion abuts the surface of the first plate, the non-movable portion having first and second openings formed therethrough. The first opening has a notch formed in each of two longitudinally extending side walls thereof. The movable portion defines a displaceable member connected to the non-movable portion by a convoluted spring formed in a second opening. The displaceable member has a tab extending outwardly from each of two longitudinally extending side walls thereof, each tab positioned within one of the notches. The displaceable member is slidingly and axially movable within the |
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