MIM annular notch groove structure sensor

The invention discloses a MIM annular notch groove structure sensor. The sensor comprises a dielectric substrate and a MIM annular grating structure arranged on the dielectric substrate. The MIM annular grating structure is formed by an inner closed metal grating structure, an outer closed metal gra...

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Bibliographische Detailangaben
Hauptverfasser: ZHOU YONGJIN, XIAO QIANXUN
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a MIM annular notch groove structure sensor. The sensor comprises a dielectric substrate and a MIM annular grating structure arranged on the dielectric substrate. The MIM annular grating structure is formed by an inner closed metal grating structure, an outer closed metal grating structure and an annular insulator. The inner closed metal grating structure and the outer closed metal grating structure are etched with more than one groove which is uniformly distributed along a circumference direction. A dielectric-plate back side of the MIM annular notch groove structure sensor is provided with a microstrip line. The microstrip line is formed through combining a short metal paster and a disc branch knot structure of a metal paster tail end. The sensor easily generates a plurality of resonance modes in a broadband, a surrounding medium parameter change is sensitive and high sensitivity sensing of the broadband can be realized.