Main vacuum pipeline structure of single-crystal furnace

The invention relates to the technical field of pipeline structures of single-crystal furnaces, and discloses a main vacuum pipeline structure of a single-crystal furnace. The main vacuum pipeline structure comprises two water-cooling vacuum pipes distributed symmetrically, one end of each water-coo...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: HUANG BAOQIANG, LIU HAI, JUN SITUO, HE XIANHAN
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention relates to the technical field of pipeline structures of single-crystal furnaces, and discloses a main vacuum pipeline structure of a single-crystal furnace. The main vacuum pipeline structure comprises two water-cooling vacuum pipes distributed symmetrically, one end of each water-cooling vacuum pipe is connected with a chassis of the single-crystal furnace, and the other end of each water-cooling vacuum pipe is connected with an end opening of a horizontal pipeline of a T-shaped vacuum pipe through a first four-way vacuum pipe; the tail end of a vertical pipeline of the T-shaped vacuum pipe is connected with one end of a vertical vacuum pipe through a second four-way vacuum pipe, the other end of the vertical vacuum pipe is connected with a first transition pipe through the second four-way vacuum pipe, the first transition pipe is connected with one end of a second transition pipe through a main valve, and the other end of the second transition pipe is connected with a main vacuum output openi