Preparation method of multi-layer composite super-thick self-lubricating hard coating
The invention discloses a preparation method of a multi-layer composite super-thick self-lubricating hard coating. The method includes the steps that firstly, the surface of a metal base body is polished into a mirror surface, the metal base body is then soaked in acid liquor to be subjected to acid...
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creator | JI SHOUCHANG WANG YANFENG LI ZHENGXIAN ZHANG CHANGWEI WANG HAONAN DU JIHONG |
description | The invention discloses a preparation method of a multi-layer composite super-thick self-lubricating hard coating. The method includes the steps that firstly, the surface of a metal base body is polished into a mirror surface, the metal base body is then soaked in acid liquor to be subjected to acid pickling and activation, and then the metal base body is placed in a vacuum chamber to be subjected to ion bombardment activation; secondly, a Ti transition layer is deposited on the surface of the metal base body; thirdly, a TiN intermediate composite layer is deposited on the surface of the Ti transition layer; fourthly, a TiC intermediate composite layer is deposited on the surface of the TiN intermediate composite layer; fifthly, a TiCN layer is deposited on the surface of the TiC intermediate composite layer; and sixthly, the deposition process from the second step to the fifth step is repeatedly executed 50-100 times, and the multi-layer composite super-thick self-lubricating hard coating with the thickness |
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subjects | CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION |
title | Preparation method of multi-layer composite super-thick self-lubricating hard coating |
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