Preparation method of multi-layer composite super-thick self-lubricating hard coating
The invention discloses a preparation method of a multi-layer composite super-thick self-lubricating hard coating. The method includes the steps that firstly, the surface of a metal base body is polished into a mirror surface, the metal base body is then soaked in acid liquor to be subjected to acid...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention discloses a preparation method of a multi-layer composite super-thick self-lubricating hard coating. The method includes the steps that firstly, the surface of a metal base body is polished into a mirror surface, the metal base body is then soaked in acid liquor to be subjected to acid pickling and activation, and then the metal base body is placed in a vacuum chamber to be subjected to ion bombardment activation; secondly, a Ti transition layer is deposited on the surface of the metal base body; thirdly, a TiN intermediate composite layer is deposited on the surface of the Ti transition layer; fourthly, a TiC intermediate composite layer is deposited on the surface of the TiN intermediate composite layer; fifthly, a TiCN layer is deposited on the surface of the TiC intermediate composite layer; and sixthly, the deposition process from the second step to the fifth step is repeatedly executed 50-100 times, and the multi-layer composite super-thick self-lubricating hard coating with the thickness |
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