Defect detection and correction of pixel circuits for AMOLED displays

A method of testing an array-based semiconductor device for defects during fabrication of the semiconductor device detects defects in said entities forming the semiconductor device at an intermediate stage in the fabrication of multiple types of entities forming the semiconductor device; determines...

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Bibliographische Detailangaben
Hauptverfasser: ALLYSON GIANNIKOURIS, GHOLAMREZA CHAJI, JONATHAN JEKIR, JAIMAL SONI
Format: Patent
Sprache:eng
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Zusammenfassung:A method of testing an array-based semiconductor device for defects during fabrication of the semiconductor device detects defects in said entities forming the semiconductor device at an intermediate stage in the fabrication of multiple types of entities forming the semiconductor device; determines whether the detected defects exceed preselected thresholds for the types of entities in which said detects are detected; if the detected defects do not exceed said preselected thresholds, continues the fabrication of the semiconductor device; and if the detected defects exceed said preselected thresholds, identifies the types of defects detected, repairs the identified defects, and continues the fabrication of the semiconductor device. According to the invention, defects and nonuniformity in a manufacturing period can be identified.