LIQUID COATING METHOD AND LIQUID COATING APPARATUS

The present disclosure discloses a liquid coating method and a liquid coating apparatus which are capable of achieving better uniformness in the film thickness of a coating film formed on a surface of a substrate. The coating processing includes: a process of coating the coating liquid in a spiral f...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KOUZOU KAWAHARA, TAKAYUKI ISHII, KATSUNORI ICHINO, KAZUYUKI TASHIRO, DAISUKE SIMOKAWA
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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