Method for calculating a height map of a body of transparent material having an inclined or curved surface

The invention relates to a method for calculating a height map of a body of a transparent material having an inclined or curved surface. The invention relates to a method for calculating a height map of a sample comprising a body of a transparent material having a refractive index (n) with an inclined or curved surface, the body being provided on an underlying surface extending laterally from underneath the body. The method comprising: positioning a first area of a body of a transparent material with an inclined or curved surface and a second area of the underlying surface extending laterally from underneath the body under an optical profiler; measuring a height map of the first area (ZIS) and the second area (ZUS) with the optical profiler; and, calculating a height map of the inclined or curved surface (HIS) by using the refractive index, the measured height map of the first area (ZIS) and the second area (ZUS).