Detection method of content of ruthenium element in electronic materials

Detection method of content of ruthenium element in electronic materials

The invention provides a method which can effectively detect the content of ruthenium element in electronic materials, wherein inductive coupling plasma atomic emission spectroscopy (ICP-OES) is employed in the method to analyze and test the content of ruthenium element. A to-be-tested electronic ma...

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Bibliographische Detailangaben
Hauptverfasser: FEI QINNI, ZHAO JIE, XIAO LIJUN, ZHOU JIE, ZHU QIANG, YAN MIN
Format: Patent
Sprache:eng
Schlagworte:
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:The invention provides a method which can effectively detect the content of ruthenium element in electronic materials, wherein inductive coupling plasma atomic emission spectroscopy (ICP-OES) is employed in the method to analyze and test the content of ruthenium element. A to-be-tested electronic material sample, during pre-treatment, needs to be subjected to acid-adding digestion with a microwave digestion system provided with a high-pressure digestion pot.