Carrier for substrates

A carrier for supporting a substrate (101) in a substrate processing chamber for vacuum processing is described. The carrier includes a substrate fixation assembly, wherein the substrate fixation assembly includes one or more fixation units (120), wherein each fixation unit includes an edge contacting surface (121) configured for contacting the edge of the substrate and defining a contact position; a first fixation element (122) having a first surface (124)configured for contacting a first substrate surface (102) of the substrate, wherein the first fixation element extends from the contact position by a first length LI substantially parallel to the first substrate surface; a second fixation element (123) having a second surface (125) configured for contacting a second substrate surface (103) of the substrate, wherein the second substrate surface opposes the first substrate surface of the substrate, and wherein the second fixation element extends from the contact position by a second length L2 substantially parallel to the second substrate surface; a force element (130) for providing a fixation force (140) for the substrate with at least one of the first and the second fixation element; wherein the shorter length of the first length and the second length provides in combination with the fixation force a moment (140); wherein the one or more fixation units provide the moment to be 10 Nmm per substrate edge length unit or above.