Air-floatation supporting device for actively regulating and controlling air pressure of throttling hole inlet
The invention discloses an air-floatation supporting device for actively regulating and controlling the air pressure of a throttling hole inlet. The air-floatation supporting device comprises an air-floatation supporting body, an active air-pressure regulating unit, a supporting body detecting unit...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | The invention discloses an air-floatation supporting device for actively regulating and controlling the air pressure of a throttling hole inlet. The air-floatation supporting device comprises an air-floatation supporting body, an active air-pressure regulating unit, a supporting body detecting unit and a driving control unit, wherein an air inlet hole, a throttling hole and a regulating unit mounting hole are formed in the air-floatation supporting body; an air inlet valve and an air outlet valve are arranged at the air inlet of the air inlet hole and the air outlet of the throttling hole respectively; a regulating cavity is formed between the active air-pressure regulating unit and the air-floatation supporting body; the supporting body detecting unit is used for real-time detection of the speed and acceleration of up-and-down motion of the air-floatation supporting body and/or the distance of the air-floatation supporting body relative to an air-floatation guide rail below the air-floatation supporting body; and the driving control unit is used for performing filtering, amplification and data processing of signals detected by a detecting device to generate driving signals to drive the active air-pressure regulating unit to deform to change the volume of the regulating cavity. The air-floatation supporting device can effectively inhibit micro-vibration of air-floatation supporting and meanwhile has the characteristics of compact structure, convenience in control and high precision. |
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