Evaporation device and evaporation method

The invention relates to an evaporation device and an evaporation method, and belongs to the technical field of vacuum evaporation. The evaporation device comprises a basal plate, an evaporation cavity and a corrugated pipe; an evaporation source is arranged in the evaporation cavity, and the side w...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	HUANG JUNSONG, YE LANKAI, SHEN YONGQI
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	The invention relates to an evaporation device and an evaporation method, and belongs to the technical field of vacuum evaporation. The evaporation device comprises a basal plate, an evaporation cavity and a corrugated pipe; an evaporation source is arranged in the evaporation cavity, and the side wall of the evaporation cavity is provided with two limiting plates; and the basal plate is arranged right above the evaporation source, and the corrugated pipe is arranged on the bottom of the evaporation cavity. The bottom of the evaporation cavity is provided with the corrugated pipe, the evaporation cavity is driven to move up and down by virtue of the rotation of the corrugated pipe, so that the relative height between the evaporation source and the limiting plate is changed, modification on the evaporation device is not needed, the evaporation condition of different organic materials can be satisfied, and not only can the device flexibility be obviously improved, but also the time and resource consumption can be saved.