Method for manufacturing mask plate
The invention discloses a method for manufacturing a mask plate. The method includes the following steps: a melting material layer is formed on a metal substrate; the surface, far away from the metal substrate, of the melting material layer is exposed and developed to form an image area with an open...
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| creator | RAN YINGGANG REN XIAOGUANG ZHOU YANGCHUAN LI JIANHUA LEI QILIN SU JUNHAI WU JUNXIONG KE XIANJUN |
| description | The invention discloses a method for manufacturing a mask plate. The method includes the following steps: a melting material layer is formed on a metal substrate; the surface, far away from the metal substrate, of the melting material layer is exposed and developed to form an image area with an opening in the melting material layer; an electroforming layer is formed in the opening with an electroforming technology; the melting material layer on the metal substrate is removed, and the metal substrate with the electroforming layer is obtained; and the electroforming layer located in the opening is separated from the metal substrate with a demolding working procedure, and the mask plate is obtained. According to the mask plate, as an etching technology is avoided, the production technology is simple, and the production cost is low; and in addition, the obtained mask plate can be high in precision degree, and therefore the mask plate can meet the requirements of a high-pixel display screen. |
| format | Patent |
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The method includes the following steps: a melting material layer is formed on a metal substrate; the surface, far away from the metal substrate, of the melting material layer is exposed and developed to form an image area with an opening in the melting material layer; an electroforming layer is formed in the opening with an electroforming technology; the melting material layer on the metal substrate is removed, and the metal substrate with the electroforming layer is obtained; and the electroforming layer located in the opening is separated from the metal substrate with a demolding working procedure, and the mask plate is obtained. According to the mask plate, as an etching technology is avoided, the production technology is simple, and the production cost is low; and in addition, the obtained mask plate can be high in precision degree, and therefore the mask plate can meet the requirements of a high-pixel display screen.</description><language>eng</language><subject>CHEMICAL SURFACE TREATMENT ; CHEMISTRY ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING MATERIAL WITH METALLIC MATERIAL ; COATING METALLIC MATERIAL ; DIFFUSION TREATMENT OF METALLIC MATERIAL ; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL ; METALLURGY ; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><creationdate>2015</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20151223&DB=EPODOC&CC=CN&NR=105177496A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25555,76308</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20151223&DB=EPODOC&CC=CN&NR=105177496A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>RAN YINGGANG</creatorcontrib><creatorcontrib>REN XIAOGUANG</creatorcontrib><creatorcontrib>ZHOU YANGCHUAN</creatorcontrib><creatorcontrib>LI JIANHUA</creatorcontrib><creatorcontrib>LEI QILIN</creatorcontrib><creatorcontrib>SU JUNHAI</creatorcontrib><creatorcontrib>WU JUNXIONG</creatorcontrib><creatorcontrib>KE XIANJUN</creatorcontrib><title>Method for manufacturing mask plate</title><description>The invention discloses a method for manufacturing a mask plate. The method includes the following steps: a melting material layer is formed on a metal substrate; the surface, far away from the metal substrate, of the melting material layer is exposed and developed to form an image area with an opening in the melting material layer; an electroforming layer is formed in the opening with an electroforming technology; the melting material layer on the metal substrate is removed, and the metal substrate with the electroforming layer is obtained; and the electroforming layer located in the opening is separated from the metal substrate with a demolding working procedure, and the mask plate is obtained. According to the mask plate, as an etching technology is avoided, the production technology is simple, and the production cost is low; and in addition, the obtained mask plate can be high in precision degree, and therefore the mask plate can meet the requirements of a high-pixel display screen.</description><subject>CHEMICAL SURFACE TREATMENT</subject><subject>CHEMISTRY</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING MATERIAL WITH METALLIC MATERIAL</subject><subject>COATING METALLIC MATERIAL</subject><subject>DIFFUSION TREATMENT OF METALLIC MATERIAL</subject><subject>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</subject><subject>METALLURGY</subject><subject>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2015</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZFD2TS3JyE9RSMsvUshNzCtNS0wuKS3KzEsH8oqzFQpyEktSeRhY0xJzilN5oTQ3g6Kba4izh25qQX58anFBYnJqXmpJvLOfoYGpobm5iaWZozExagDhrSZ4</recordid><startdate>20151223</startdate><enddate>20151223</enddate><creator>RAN YINGGANG</creator><creator>REN XIAOGUANG</creator><creator>ZHOU YANGCHUAN</creator><creator>LI JIANHUA</creator><creator>LEI QILIN</creator><creator>SU JUNHAI</creator><creator>WU JUNXIONG</creator><creator>KE XIANJUN</creator><scope>EVB</scope></search><sort><creationdate>20151223</creationdate><title>Method for manufacturing mask plate</title><author>RAN YINGGANG ; REN XIAOGUANG ; ZHOU YANGCHUAN ; LI JIANHUA ; LEI QILIN ; SU JUNHAI ; WU JUNXIONG ; KE XIANJUN</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_CN105177496A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2015</creationdate><topic>CHEMICAL SURFACE TREATMENT</topic><topic>CHEMISTRY</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING MATERIAL WITH METALLIC MATERIAL</topic><topic>COATING METALLIC MATERIAL</topic><topic>DIFFUSION TREATMENT OF METALLIC MATERIAL</topic><topic>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</topic><topic>METALLURGY</topic><topic>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</topic><toplevel>online_resources</toplevel><creatorcontrib>RAN YINGGANG</creatorcontrib><creatorcontrib>REN XIAOGUANG</creatorcontrib><creatorcontrib>ZHOU YANGCHUAN</creatorcontrib><creatorcontrib>LI JIANHUA</creatorcontrib><creatorcontrib>LEI QILIN</creatorcontrib><creatorcontrib>SU JUNHAI</creatorcontrib><creatorcontrib>WU JUNXIONG</creatorcontrib><creatorcontrib>KE XIANJUN</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>RAN YINGGANG</au><au>REN XIAOGUANG</au><au>ZHOU YANGCHUAN</au><au>LI JIANHUA</au><au>LEI QILIN</au><au>SU JUNHAI</au><au>WU JUNXIONG</au><au>KE XIANJUN</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Method for manufacturing mask plate</title><date>2015-12-23</date><risdate>2015</risdate><abstract>The invention discloses a method for manufacturing a mask plate. The method includes the following steps: a melting material layer is formed on a metal substrate; the surface, far away from the metal substrate, of the melting material layer is exposed and developed to form an image area with an opening in the melting material layer; an electroforming layer is formed in the opening with an electroforming technology; the melting material layer on the metal substrate is removed, and the metal substrate with the electroforming layer is obtained; and the electroforming layer located in the opening is separated from the metal substrate with a demolding working procedure, and the mask plate is obtained. According to the mask plate, as an etching technology is avoided, the production technology is simple, and the production cost is low; and in addition, the obtained mask plate can be high in precision degree, and therefore the mask plate can meet the requirements of a high-pixel display screen.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION |
| title | Method for manufacturing mask plate |
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