Method for manufacturing mask plate

The invention discloses a method for manufacturing a mask plate. The method includes the following steps: a melting material layer is formed on a metal substrate; the surface, far away from the metal substrate, of the melting material layer is exposed and developed to form an image area with an open...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: RAN YINGGANG, REN XIAOGUANG, ZHOU YANGCHUAN, LI JIANHUA, LEI QILIN, SU JUNHAI, WU JUNXIONG, KE XIANJUN
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The invention discloses a method for manufacturing a mask plate. The method includes the following steps: a melting material layer is formed on a metal substrate; the surface, far away from the metal substrate, of the melting material layer is exposed and developed to form an image area with an opening in the melting material layer; an electroforming layer is formed in the opening with an electroforming technology; the melting material layer on the metal substrate is removed, and the metal substrate with the electroforming layer is obtained; and the electroforming layer located in the opening is separated from the metal substrate with a demolding working procedure, and the mask plate is obtained. According to the mask plate, as an etching technology is avoided, the production technology is simple, and the production cost is low; and in addition, the obtained mask plate can be high in precision degree, and therefore the mask plate can meet the requirements of a high-pixel display screen.