Cleaning method and system for a reel-to-reel polyimide film

The invention provides a cleaning method and system for a reel-to-reel polyimide film. The cleaning method includes the following steps that the winding drum type polyimide film is provided; the polyimide film is unreeled; the polyimide film is subjected to film face cleaning, wherein according to f...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: CHEN WENQIN, AKIHISA HAMAZAWA, FAN SHICHENG, CHEN ZONGYI, QIU JIANFENG
Format: Patent
Sprache:eng
Schlagworte:
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