Cleaning method and system for a reel-to-reel polyimide film

The invention provides a cleaning method and system for a reel-to-reel polyimide film. The cleaning method includes the following steps that the winding drum type polyimide film is provided; the polyimide film is unreeled; the polyimide film is subjected to film face cleaning, wherein according to f...

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Bibliographische Detailangaben
Hauptverfasser: CHEN WENQIN, AKIHISA HAMAZAWA, FAN SHICHENG, CHEN ZONGYI, QIU JIANFENG
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The invention provides a cleaning method and system for a reel-to-reel polyimide film. The cleaning method includes the following steps that the winding drum type polyimide film is provided; the polyimide film is unreeled; the polyimide film is subjected to film face cleaning, wherein according to film face cleaning, dry type film face cleaning can be firstly conducted and then wet type film face cleaning is conducted, or wet type film face cleaning is firstly conducted and then dry type film face cleaning is conducted; and the polyimide film is reeled. In addition, the cleaning system sequentially comprises an unreeling device, a film face cleaning device and a reeling device, wherein the film face cleaning device can be firstly a dry type cleaning machine and then a wet type cleaning machine, or the film face cleaning device can be firstly the wet type cleaning machine and then the dry type cleaning machine.