Soldering-resistance conductive thin film on surface of sensitive structure of space electrostatic accelerometer and production technology thereof

The invention discloses a soldering-resistance conductive thin film on the surface of a sensitive structure of a space electrostatic accelerometer. The soldering-resistance conductive thin film comprises a titanium film layer, a platinum film layer and a gold film layer, one side of the titanium fil...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: WANG ZUOLEI, XI DONGXUE, XUE DATONG, LEI JUNGANG, HUO HONGQING, ZHOU HAIJIA, YIN DONGDONG, SHAO HANG
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The invention discloses a soldering-resistance conductive thin film on the surface of a sensitive structure of a space electrostatic accelerometer. The soldering-resistance conductive thin film comprises a titanium film layer, a platinum film layer and a gold film layer, one side of the titanium film layer is adhered with the surface of a sensitive structure piece of the space electrostatic accelerometer, and the other side surface is sequentially connected with the platinum film layer and the gold film layer. The soldering-resistance conductive thin film completely uses the non-magnetic materials, thus there is no noise interference on measurement of the space electrostatic accelerometer, and all the materials have relatively low coefficient of line-expansion, the relatively good matching between substrate glass material and each film layer can be ensured and stability of the thin film can be ensured.