Three-axis anisotropic magnetic resistance for improving Z-axis sensitivity and preparation method for three-axis anisotropic magnetic resistance

The invention provides a three-axis anisotropic magnetic resistance for improving Z-axis sensitivity and a preparation method for the three-axis anisotropic magnetic resistance. A perpendicular magnetic resistance repair circuit specially for repairing perpendicular magnetic resistance is formed on...

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Bibliographische Detailangaben
Hauptverfasser: KONG YURAN, WANG JIANPENG, SHI TING
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The invention provides a three-axis anisotropic magnetic resistance for improving Z-axis sensitivity and a preparation method for the three-axis anisotropic magnetic resistance. A perpendicular magnetic resistance repair circuit specially for repairing perpendicular magnetic resistance is formed on the perpendicular magnetic resistance, so that the magnetic domain of the perpendicular magnetic resistance can be sequenced in the perpendicular direction along groove depth to ensure the stability of the perpendicular magnetic resistance; and in addition, the magnetic domain of the perpendicular magnetic resistance is sequenced in the perpendicular direction, so that the magnetic domains for involving in operation in the perpendicular direction are increased, so as to improve the sensitivity of the perpendicular magnetic resistance of the Z axis.