OPTICAL NON-DESTRUCTIVE INSPECTION METHOD AND OPTICAL NON-DESTRUCTIVE INSPECTION APPARATUS

An optical non-destructive inspection method includes: heating including setting a measurement spot (SP) on a surface of a workpiece and irradiating the measurement spot with heating laser light using a heating laser light source (21), heat ray detectors (31, 32), and a controller (50); acquiring a...

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Bibliographische Detailangaben
Hauptverfasser: JUN MATSUMOTO, RYOTARO SEO, KOUYA YOSHIDA, NAOKI MATSUMOTO
Format: Patent
Sprache:eng
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Zusammenfassung:An optical non-destructive inspection method includes: heating including setting a measurement spot (SP) on a surface of a workpiece and irradiating the measurement spot with heating laser light using a heating laser light source (21), heat ray detectors (31, 32), and a controller (50); acquiring a temperature rise property that is a temperature rise state of the measurement spot according to a heating time by detecting a heat ray radiated from the measurement spot to determine a temperature at the measurement spot; and determining whether or not a pressure contact state at pressure contact portions (91B, 92B), which include a contact area and a contact pressure, is appropriate based on the temperature rise property.