Marking method for TEM chip sample

The invention provides a marking method for a TEM chip sample. The portion, 0.2 micrometer-0.3 micrometer away from an object region, of the chip sample is damaged with a TEM to form an amorphous ring, and the radius of the amorphous ring is smaller than the distance between the amorphous ring and t...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	YUAN ANDONG, CHEN QIANG
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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