Ito patterning device and patterning method

An ITO patterning device and a patterning method are disclosed. An ITO patterning method according to an aspect of the present invention comprises the steps of: forming an amorphous ITO layer on film or glass; forming a portion, which is to be formed as an ITO pattern, as polycrystalline ITO by part...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: PARK BYEONG KYU, KIM SU CHAN, LEE CHAN KOO, BAE HYUN SEOP, KIM YOUNG WON
Format: Patent
Sprache:eng
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