Electron cyclotron resonance magnetic module and electron cyclotron resonance device

The invention discloses an electron cyclotron resonance magnetic module and an electron cyclotron resonance device. The magnetic module comprises multiple layers of magnetic-conducting ring bodies and multiple magnetic columns, wherein each magnetic-conducting ring body comprises an inner annular wall and an outer annular wall; a plurality of radial holes are formed in each magnetic-conducting ring body; the multiple magnetic columns are respectively embedded into the radial holes in the multiple layers of magnetic-conducting ring bodies; and the magnetic fields of the magnetic columns of the two adjacent magnetic-conducting ring bodies are opposite. The electron cyclotron resonance device employing the magnetic module can operate under high vacuum to facilitate formation of a coating with a single atomic layer on a base material.