PIEZOELECTRIC ACTUATOR AND ROBOT
A piezoelectric actuator includes a piezoelectric element, a vibrating plate configured to vibrate according to application of a signal to the piezoelectric element, and a driven body driven by the vibration of the vibrating plate. The vibrating plate vibrates in a first mode according to a signal h...
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Zusammenfassung: | A piezoelectric actuator includes a piezoelectric element, a vibrating plate configured to vibrate according to application of a signal to the piezoelectric element, and a driven body driven by the vibration of the vibrating plate. The vibrating plate vibrates in a first mode according to a signal having a first frequency, vibrates in a second mode according to a signal having a second frequency, and vibrates in a third mode according to a signal having a third frequency. The first frequency and the second frequency are different. The first frequency and the third frequency are different. |
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