Aluminum-substrate-based three-dimensional lamination chip packaging structure and preparation method thereof

The invention discloses an aluminum-substrate-based three-dimensional lamination chip packaging structure and a preparation method thereof. The structure comprises at least two layers of functionalized aluminum substrates, chips, aluminum-based dams, epoxy resin base bodies, a side metalized interco...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: ZHANG CHENG, CAO XIANGRONG, WU WEIWEI, WANG LICHUN, LIU MIFENG, CHEN JING
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:The invention discloses an aluminum-substrate-based three-dimensional lamination chip packaging structure and a preparation method thereof. The structure comprises at least two layers of functionalized aluminum substrates, chips, aluminum-based dams, epoxy resin base bodies, a side metalized interconnection layer, and a signal leading-out layer. The functionalized aluminum substrates arranged in parallel have two opposite first surfaces and second surfaces. Chips are pasted on the second surfaces. The aluminum-based dams are pasted on the first surfaces. The epoxy resin base bodies are arranged between the functionalized aluminum substrates and the aluminum-based dams. The side metalized interconnection layer and the signal leading-out layer are arranged at the outer sides of the packaging structure in an encircling mode. The functionalized aluminum substrates contain aluminum-buried interconnection layers and through holes; and the chips and the aluminum-buried interconnection layers are electrically connected. Besides, the method includes the steps of preparation of functionalized aluminum substrates, preparation of through holes of the functionalized aluminum substrates, packaging of a multi-chip module, preparation of a signal leading-out layer; packaging of a three-dimensional lamination layer, and preparation of a side metalized interconnection layer. According to the invention, the packaging efficiency and interaction density are improved; and the size of the three-dimensional lamination chip packaging is effectively reduced.