Sapphire automatic control system and control method

The invention relates to the technical field of a crystal growth furnace, and provides a sapphire automatic control system and control method. The method comprises the following steps of setting software which comprises automatic control, recipe control and manual control programs, wherein a weighin...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LIU BIN, LIAO KANGWEI, LIU JIAN, GENG SHUBIN, CHEN JIANMING
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The invention relates to the technical field of a crystal growth furnace, and provides a sapphire automatic control system and control method. The method comprises the following steps of setting software which comprises automatic control, recipe control and manual control programs, wherein a weighing detection module, a parameter setting module, a calculation module, a pulling speed regulating module, a comparison module and a power regulating module are adopted; setting a plurality of parameter items in the automatic control program; setting all of the parameter items before the processes of shouldering and equal-diameter growth; carrying out automatic regulation on the power reduction amplitude according to the comparison between the actual growth speed and the theoretical growth speed corresponding to different sapphire weight stages, wherein the regulating mode is determined according to the parameter setting, and the lifting and pulling speed is operated according to the set value; automatically controlling the sapphire growth to enter the ending stage by the automatic control program after the sapphire shouldering and equal-diameter growth are completed. The system and the method provided by the invention have the advantages that the goal of automatically calculating the actual and theoretical growth speeds is achieved; the automatic control of the power is further realized; the consistency of the obtained crystals is improved; the labor cost is reduced.