Manufacturing method for mask plate

The invention relates to a manufacturing method for a mask plate. The manufacturing method comprises the following steps: forming a melting material layer on a base plate; aerating and developing the base plate provided with the melting material layer so as to form a picture region with an opening i...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: GONG JIANGUO, RAN YINGGANG, WANG HONGYING, ZHOU YANGCHUAN, LI JIANHUA, SU JUNHAI, WU JUNXIONG, KE XIANJUN, MA DEGUI
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The invention relates to a manufacturing method for a mask plate. The manufacturing method comprises the following steps: forming a melting material layer on a base plate; aerating and developing the base plate provided with the melting material layer so as to form a picture region with an opening in the melting material layer; forming a metal layer on the base plate provided with the melting material layer; and removing the melting material layer to separate the metal layer on the melting material layer from the base plate so as to obtain the mask plate. According to the mask plate, as an etching technology is not adopted, the production process is simple and the production cost is relatively low, and moreover, the precision of the mask can be relatively high, so that the mask plate can satisfy the demand of a high-resolution display screen.