Span line pressure effect compensation for diaphragm pressure sensor
A differential pressure sensor for sensing a differential pressure of a process fluid includes a sensor body having a sensor cavity formed therein with a cavity profile. A diaphragm in the sensor cavity deflects in response to an applied differential pressure. The diaphragm has a diaphragm profile....
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | A differential pressure sensor for sensing a differential pressure of a process fluid includes a sensor body having a sensor cavity formed therein with a cavity profile. A diaphragm in the sensor cavity deflects in response to an applied differential pressure. The diaphragm has a diaphragm profile. A gap formed between the cavity profile and the diaphragm profile changes as a function of the differential pressure. At least one of the cavity profile and diaphragm profile changes as a function of a line pressure to compensate for changes in the gap due to deformation of the sensor body from the line pressure. |
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